– Travel range : 5 mm
– Sensitivity : 1µm
– Rough XY travel range : ±20 mm
– Tracking accuracy : 2 µm
– Reading accuracy : 5 µm(half division)
– Load capacity:
Horizontal : 3 kg
Vertical : 1 kg
– Travel range : 5 mm
– Sensitivity : 1µm
– Rough XY travel range : ±20 mm
– Tracking accuracy : 2 µm
– Reading accuracy : 5 µm(half division)
– Load capacity:
Horizontal : 3 kg
Vertical : 1 kg