– Double capacity sensor technology for feedback
– Travel range in horizontal directions up to: 200 µm,
– Travel range in vertical direction up to : 20 µm,
– Ultra high resolution: 0.1 nm
– Clear aperture diameter 45 mm
– Low cost
– Compact design and low weight
– Suitable for universal applications
– High stiffness
– Compensated creep effect
– Low frequency noise resistance
– Ideal capable for microscopic application
– Vacuum version available
→ 상품 상세 정보 : 8NTS-XYZ-200-A – Piezo scanning stage with central hole
