– DC-motor-driven configuration is available
with resolutions of 1 µm and 0.1 µm.
– High stiffness and thermal stability with a
low profile design
– Manual version of Linear Positioning Stages
– Version for vacuum
– DC-motor-driven configuration is available
with resolutions of 1 µm and 0.1 µm.
– High stiffness and thermal stability with a
low profile design
– Manual version of Linear Positioning Stages
– Version for vacuum